招生信息:课题组长期招收博士后、博士、硕士、本科生,欢迎感兴趣的同学将简历等资料发送至邮箱yplu@pku.edu.cn
教育及工作经历:
荣誉与学术兼职:
主要研究领域:
研究成果概况:
在超声指纹识别传感器及其核心压电微型超声换能器(PMUT)的机理、工艺、微系统集成和产业化方面做出了原创性的突出贡献。开发出全球首例与CMOS集成于一体、性能指标国际领先的PMUT阵列,同时解决了集成和量产等关键科学技术难题。国际上首次提出多项PMUT新机理、先进微加工工艺并实现CMOS兼容的高密度高频PMUT阵列,首次运用AlN PMUT阵列通过波束聚焦实现高精度超声成像,并进一步开发出达到FBI标准可实现皮下真皮层检测的指纹识别传感器,解决了传统指纹传感器在安全性、稳定性、穿透性等方面的关键难题。此项技术作为MEMS领域近年来一个颠覆性的突破(IEEE MEMS大会特邀报告、MEMS/ISSCC最佳论文奖),其相关工作被包括Nature News, BBC Focus, National Academy of Engineering(NAE)Radio等30多家国际知名杂志重点报道,相关核心专利专利被美国业界领军公司竞买。在美国高通先进技术研发部主导开发的微型超声指纹识别传感器实现了全球首例用于手机屏下的超声指纹识别传感器、量产出货数亿颗,并作为唯一解决方案应用于多个领域。迄今为止,在微机电系统和传感器领域顶级期刊(JMEMS,TUFFC,JSSC,APL等)和会议(MEMS, ISSCC等)发表文章37篇,参与英文专著一项,拥有美国专利32项(其中20余项已转让或形成产品)。
代表性论著:
1. Y. Lu, H. Tang, S. Fung, Q. Wang, J.M. Tsai, M. Daneman, B.E. Boser, and D.A. Horsley, " Ultrasonic Fingerprint Sensor Using a Piezoelectric Micromachined Ultrasonic Transducer Array Integrated with CMOS Electronics", Applied Physics Letters, 106, p. 263503, 2015 (Cover)
2. Y. Lu, H. Tang, S. Fung, B.E. Boser, and D.A. Horsley, "Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array with Transmit Beam-Forming", J. Microelectromechanical Systems, 99, pp. 1-9, 2016
3. Y. Lu, H. Tang, Q. Wang, S. Fung, J.M. Tsai, M. Daneman, B.E. Boser, and D.A. Horsley, "Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging", Applied Physics Letters, 106, p. 193506, 2015
4. Y. Lu and D.A. Horsley, "Modeling, Fabrication and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers", J. Microelectromechanical Systems, 24(4), pp. 1142-1149, 2015
5. Y. Lu, A. Heidari, and D.A. Horsley, "A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers", J. Microelectromechanical Systems, 24(4), pp. 904-913, 2015
6. X. Jiang, Y. Lu, H.Y. Tang, J.M. Tsai, E.J. Ng, M.J. Daneman, B.E. Boser, D.A. Horsley, “Monolithic Ultrasound Fingerprint Sensor”, Microsystems & Nanoengineering - Nature, Vol. 3, p. 17059, 2017
7. H.Y. Tang, Y. Lu, X. Jiang, E.J. Ng, J.M. Tsai, D.A. Horsley, B.E. Boser, “3-D Ultrasonic Fingerprint Sensor-on-a-Chip”, IEEE Journal of Solid-State Circuits, 51 (11), 2016
8. Y. Lu, X. Wu, W. Zhang, W. Chen, et al, “Research on Reference Vibration for Two-axis Piezoelectric Micro-Machined Gyroscope” Journal of Micromechanics and Microengineering, 20 (07), p. 5039, 2010
9. Q. Wang, Y. Lu, S. Mishin, Y. Oshmyansky, D.A. Horsley, Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers, J. Microelectromechanical Systems, 26 (5), pp. 1132-1139, 2017
10. Y. Lu, X. Wu, W. Zhang, and W. Chen, “Optimization and Analysis of Novel Piezoelectric Solid Micro-Gyroscope with High Resistance to Shock” Microsystem technologies, 16, pp. 571–584, 2010
11. Y. Lu, H. Tang, S. Fung, B. E. Boser, and D. A. Horsley, "Short-Range and High-Resolution Ultrasound Imaging Using an 8 MHz Aluminum Nitride PMUT Array," IEEE MEMS, pp. 140-143, 2015. Best Paper Award Finalist
12. Y. Lu, O. Rozen, H. Tang, G.L. Smith, S. Fung, B.E. Boser, R.G. Polcawich, D.A. Horsley, "Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes," IEEE MEMS, pp. 146-149, 2015
13. Y. Lu, A. Heidari, S. Shelton, A. Guedes and D.A. Horsley, "High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging," IEEE MEMS, pp. 745-748, 2014
14. Y. Lu, S. Shelton and D.A. Horsley, "High frequency and high fill factor piezoelectric micromachined ultrasonic transducers based on cavity SOI wafers", Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head), pp. 131-134, 2014
15. H. Tang, Y. Lu, F. Assaderaghi, M. Daneman, X. Jiang, M. Lim, X. Li, E. Ng, U. Singhal, J.M.Tsai, D.A. Horsley, B.E. Boser, “3-D Ultrasonic Fingerprint Sensor on a Chip”, ISSCC, pp. 202-203, 2016, Lewis Winner Award
16. H. Tang, Y. Lu, S. Fung, D.A. Horsley, B.E. Boser, "Integrated Ultrasonic System for Measuring Body-Fat Composition", ISSCC, pp. 1-3, 2015
17. X. Jiang, H. Tang, Y. Lu, X. Li, J.M.Tsai, E. Ng, M. Daneman, M. Lim, F. Assaderaghi, B.E. Boser, D.A. Horsley, “Monolithic 591×438 DPI Ultrasonic Fingerprint Sensor”, IEEE MEMS, pp. 107-110, 2016 Best Paper Award
18. Y. Lu, Q. Wang, and D.A. Horsley, “Piezoelectric Micromachined Ultrasonic Transducers with Increased Coupling Coefficient via Series Transduction”, IEEE International Ultrasonics Symposium (IUS), pp. 1-4, 2015
19. H. Tang, Y. Lu, S. Fung, J.M. Tsai, M. Daneman, D.A. Horsley, B.E. Boser, “Pulse-echo ultrasonic fingerprint sensor on a chip”, Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 674-677, 2015
20. X. Jiang, H. Tang, Y. Lu, E.J. Ng, J.M. Tsai, B.E. Boser, D.A. Horsley,“Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry”, IEEE Transactions on UFFC, 64(9), pp1401-1408, 2017
代表性知识产权:
1. Y. Lu, D.A. Horsley, H. Tang, and B.E. Boser, “MUT Fingerprint ID System”, 2014, US Patent 14/896,150.已转让并产业化(被业界领军公司竞买,被其他美国专利他引43次)。
2. Y. Lu, H.Y., Tang, H.V. Panchawagh, “Superpixel Array of Piezoelectric Ultrasonic Transducers for 2-D Beamforming”, 2016, US Patent US 14/883,586.
3. Y. Lu, D.W. Burns, “Biometric System with Photoacoustic Imaging”, 2017, US Patent 15/149, 048. 生物识别、人机交互传感
4. Y. Lu, D.W. Burns, “Biometric system with photoacoustic imaging”, 2017, US Patent 15/149,046. 医疗健康。
5. Y. Lu, J.L. Strohmann, H.V. Panchawagh, “Reducing background signal in imaging sensors”, 2019, US Patent 10,817,694.
6. Y. Lu, H.V. Panchawagh, K.D. Djordjev, J.H. Seo, N.I. Buchan, C.J. Tseng, T Kao, “Ultrasonic fingerprint sensor with flexible substrate”, 2020, US Patent 16/525,030.。
7. Y. Lu, H.V. Panchawagh, K.D. Djordjev, C.J. Tseng, N.I. Buchan, T. Kao, J.H. Seo, “Ultrasonic fingerprint sensor with electrically nonconductive acoustic layer”, 2019, US Patent App. 16/252,408.
8. Y. Liang, Y. Lu, H.V. Panchawagh, J.L. Strohmann, C. Xu, Temperature and ultrasonic sensor fusion for biometric sensing, 2020, US Patent 11/182,026.
9. Y. Kusano, Y. Lu, J.L. Strohmann, H.V. Panchawagh, Ultrasonic sensor array, 2019, US Patent 16/455,472.
10. Y. Lu, J.L. Strohmann, I Badge, H.V. Panchawagh, T. Kao, Apparatus and method for improved biometric sensing, 2019, US Patent 16/544,681.
11. H. Tang, Y. Lu, H.V. Panchawagh, Active beam-forming technique for piezoelectric ultrasonic transducer array, 2018, US Patent 14/883,585.
12. Y. Lu, H.V. Panchawagh, J.L. Strohmann, K.D. Djordjev, “Ultrasonic sensor array control to facilitate screen protectors”, 2020, US Patent 16/414,164.
13. J.L. Strohmann, Y. Lu, H.V. Panchawagh, “Broadband ultrasonic sensor”, 2020, US Patent 16/407,070.
14. J.L. Strohmann, Y. Lu, A. Hinger, D.W. Burns, Ultrasonic biometric system with harmonic detection, 2018, US Patent App. 15/804,902
15. D.A. Horsley, Y. Lu, O. Rozen, 书籍"Piezoelectric MEMS Resonators", 章节6,"Flexural Piezoelectric Resonators", 153-173, Springer International Publishing,2017.